Collaborative Laboratory and User Facility for Electron Microscopy

Titan E-TEM 80-300 (environmental transmission electron microscope)

The Titan 80-300 Environmental atomic-resolution Scanning/Transmission Electron Microscope (STEM) is an all-in-one solution for time-resolved in situ studies of dynamic behavior of nanomaterials during exposure to reactive gas environments and elevated temperatures.
Titan ETEM is combined with image Cs corrector, FEI?s X-FEG module and a monochromator, atomic-resolution S/TEM imaging, Oxford INCA 80mm EDX detector and a Quantum 965ER Gatan Image Filter (GIF). Gas pressures in ETEM experiments can be accurately preset from 10-3 Pa up to 2000 Pa (for N2). The ETEM is also equipped with a mass spectrometer to determine gas composition either in the gas inlet system or in the specimen area. A built-in plasma cleaner allows for cleaning of the specimen area after using a gas.

FEI Nova NanoLab 600 DualBeam (FIB/SEM)

The FEI Nova NanoLab 600 FIB is a versatile, high-performance DualBeam system containing a Ga+ focused ion beam (FIB) together with a high resolution (1.5nm) scanning electron microscope (SEM). The main purpose of the Nova is site-specific specimen preparation and nano patterning.
The system is equipped with a Pt and a TEOS deposition source and a gas injection system for enhanced etching (Iodine) and an Omniprobe for micro manipulation of the specimen and in-situ lift-out of for example TEM lamellae. The piezo-driven 5-axis stage is fully computerized with reliable repeatability and sub µm step size. Up to 6 SEM stubs can be mounted at a time. The software package includes "Run Script" which allows automated imaging and processing tasks such as AutoTEM© and an in-house built Slice and View script for 3-D reconstruction from serial sectioning (FIB-tomogrpahy) of the sample. Various sample holders and techniques are available to perform top-down and plane-view lamellae.

FEI Nova NanoSEM 650

The FEI Nova NanoSEM 650 scanning electron microscope equipped with a powerful combination of advanced optics (including a two-mode final lens), SE/BSE (Secondary Electrons/Backscattered Electrons) in-lens detection and beam deceleration. In addition the Nova has high sensitivity retractable SE/BSE and STEM detectors, and can be run in a low vacuum mode (<2mbar). The piezo-driven 5-axis stage is fully computerized with reliable repeatability. Up to 7 SEM stubs can be mounted at a time. TSL EBSD package installed to allow for orientation imaging as well as Oxford Xmax 80 EDS system with INCA software for microanalysis. Two gas incection systems are mounted: one with a standard Pt precursor and a second one which can be filled with any material with feasible vapor pressure in the possible heating range of 20 < T < 60 C . The system is equipped with Kleindiek micromanipulators.

FEI/Philips CM-200T TEM

The CM200 FEG microscope with a UltraTwin objective lens is a general purpose 200 kV research TEM and is optimized for diffraction analysis and high resolution imaging (up to 0,12nm). It is equipped with an element EDS X-ray detector and can sample areas at the 10-20nm scale and Gatan CCD camera.

FEI/Philips CM-120 TEM

The CM120 is the analytical Scanning/Transmission Electron Microscope operated at 120kV and equipped with a Twin Lens, a Gatan BioScan CCD camera and a Noran Energy Dispersive X-ray spectrometer.

FEI/Philips CM30

The CM30 LaB6 Transmission Electron Microscope is operated at 300 kV and equipped with a Twin Lens, a Gatan CCD camera and a variety of specimen holders. This is the ideal instrument for conventional techniques such as bright and dark field imaging, SAED and high resolution imaging down to 0,3nm used for in-situ mechanical test experiments.


The CM12 is the analytical Scanning/Transmission Electron Microscope operated at 120kV and equipped with a Twin Lens, a Mega View CCD camera and an Oxford INCA 80mm Energy Dispersive X-ray spectrometer.

TEM specimen holders

  • Low background double-tilt analytical holders
  • Single-tilt holders
  • 360 rotational specimen holder
  • STM holder for in-situ electrical measurements
  • STM holder for in-situ electrical measurements with optical stimulation
  • Holder for in-situ mechanical stress tests
  • Single-tilt N2 cooling holder (up to -178C)
  • Single-tilt heating holder (up to +1000C)
  • Gatan 636 single tilt Cooling N2 holder
  • Gatan Heating holder
  • Zughalter
  • FIM Spitzenhalter