Abstract van Dorp
"The electron microscope as a nanolab: writing with electrons"
An electron microscope is suitable not only for imaging samples, it can also be used to modify samples. Similar to processing with a focused ion beam, the electron beam can be used to etch and deposit materials. This technique is called focused electron beam induced processing (FEBIP). In a FEBIP experiment gaseous precursor molecules are introduced into the sample chamber of an electron microscope. At the sample surface, the electrons crack the (adsorbed) gas molecules. Depending on the precursor type, the dissociated molecules leave a residue and form a deposit or they react with the substrate to etch a hole or trench. FEBIP is used for instance in the production of integrated circuits.
I will present how I have used the electron microscope to study several aspects of FEBIP. For instance, I have shown that sub-1 nm deposits can be written using an E-TEM. I have identified that the minimal spatial resolution is determined by secondary electron emission. My currents efforts are focused on developing organometallic precursors that yield material with superior qualities.