C 4 - Multilayer zone plates and Laue lenses for x-ray microscopy

In the next phase of project C04 we will investigate high resolution microscopy and spatially resolved near-edge x-ray absorption fine structure (NEXAFS) spectroscopy in the soft x-ray range using a compact, debris-free and long-term stable laser-produced plasma source. Merging the up to now separately investigated ?water window? microscope with the NEXAFS spectrometer will enable both high spatial resolution and chemical sensitivity to study various organic and inorganic sample systems. To reach this goal, the brilliance of the laboratory source shall be increased by employing picosecond lasers and redesigning the target system in order to improve resolution, contrast and efficiency.

Members of this project:

Dr. Klaus Mann
Dr. Matthias Müller


Holburg, J., Müller, M., Mann, K. and Wieneke, S. (2019)
Brilliance improvement of laser-produced extreme ultraviolet and soft x-ray plasmas based on pulsed gas jets
J. Vac. Sci. Technol. A, 37(3): 031303-1, DOI:10.1116/1.5089201

Müller, M., Mey, T., Niemeyer, J., Lorenz, M. and Mann, K. (2016)
Table-to Soft X-ray Microscopy with a Laser-induced Plasma Source Based on a Pulsed Gas-jet
AIP Conference Proceedings, 1764, DOI:10.1063/1.4961137

Kühl, F.-C., Müller, M., Schellhorn, M., Mann K., W. S. and Eusterhues, K. (C. (2016)
Near-edge x-ray absorption fine structure spectroscopy at atmospheric pressure with a table-top laser-induced soft x-ray source
Journal of Vacuum Science & Technology, A 34(4): 041302, DOI:10.1116/1.4950599

Keitel, B., Plönjes, E., Kreis, S., Kuhlmann, M., Tiedtke, K., Mey, T., Schäferb, B. and Mann, K. (2015)
Hartmann wavefront sensors and their application at FLASH
JOURNAL OF SYNCHROTRONRADIATION, 23: 43-49, DOI:10.1107/S1600577515020354

Eberl, C., Döring, F., Liese, T., Schlenkrich, F., Roos, B., Hahn, M., Hoinkes, T., Rauschenbeutel, A., Osterhoff, M., Salditt, T. and Krebs, H.-U. (2014)
Fabrication of laser deposited high-quality multilayer zone plates for hard X-ray nanofocusing
Appl. Surf. Sci., 307: 638-644, DOI:10.1016/j.apsusc.2014.04.089

Müller, M., Mey, T., Niemeyer, J. and Mann, K. (2014)
Table-top soft x-ray microscope using laser-induced plasma from a pulsed gas jet.
Opt. Express, 22(19): 23489-95, DOI:10.1364/OE.22.023489

Döring, F., Robisch, A., Eberl, C., Osterhoff, M., Ruhland, A., Liese, T., Schlenkrich, F., Hoffmann, S., Bartels, M., Salditt, T. and Krebs, H. U. (2013)
Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate
Opt. Express, 21(16): 19311, DOI:10.1364/OE.21.019311

Eberl, C., Liese, T., Schlenkrich, F., Döring, F., Hofsäss, H. and Krebs, H.-U. (2013)
Enhanced resputtering and asymmetric interface mixing in W/Si multilayers
Appl. Phys. A, 111(2): 431-437, DOI:10.1007/s00339-013-7587-5

Müller, M., Kühl, F.-C., Groß mann, P., Vrba, P. and Mann, K. (2013)
Emission properties of ns and ps laser-induced soft x-ray sources using pulsed gas jets
Opt. Express, 21(10): 12831-42

Osterhoff, M., Bartels, M., Döring, F., Eberl, C., Hoinkes, T., Hoffmann, S., Liese, T., Radisch, V., Rauschenbeutel, A., Robisch, A.-L., Ruhland, A., Schlenkrich, F., Salditt, T. and Krebs, H.-U. (2013)
Two-dimensional sub-5nm hard x-ray focusing with MZP
Adv. X-Ray/EUV Opt. Components VIIISPIE,: 1, DOI:10.1117/12.2025389

Döring, S., Hertlein, F., Bayer, A. and Mann, K. (2012)
EUV reflectometry for thickness and density determination of thin film coatings
Appl. Phys. A, 107(4): 795-800, DOI:10.1007/s00339-012-6914-6

Grossmann, P., Rajkovic, I., Moré, R., Norpoth, J., Techert, S., Jooss, C. and Mann, K. (2012)
Time-resolved near-edge x-ray absorption fine structure spectroscopy on photo-induced phase transitions using a tabletop soft-x-ray spectrometer.
Rev. Sci. Instrum., 83(5): 053110, DOI:10.1063/1.4718936

Mey, T., Rein, M., Groß mann, P. and Mann, K. (2012)
Brilliance improvement of laser-produced soft x-ray plasma by a barrel shock
New J. Phys., 14(7): 073045, DOI:10.1088/1367-2630/14/7/073045

Müller, M., Barkusky, F., Feigl, T. and Mann, K. (2012)
EUV damage threshold measurements of Mo/Si multilayer mirrors
Appl. Phys. Aopen access,, 108(2): 263-267, DOI:10.1007/s00339-012-7037-9

Barkusky, F., Bayer, A. and Mann, K. (2011)
Ablation of polymers by focused EUV radiation from a table-top laser-produced plasma source
Appl. Phys. A, 105(1): 17-23, DOI:10.1007/s00339-011-6540-8

Liese, T., Radisch, V., Knorr, I., Reese, M., Groß mann, P., Mann, K. and Krebs, H.-U. (2011)
Development of laser deposited multilayer zone plate structures for soft X-ray radiation
Appl. Surf. Sci.Elsevier B.V.,, 257(12): 5138-5141, DOI:10.1016/j.apsusc.2010.10.076

Sedlmair, J., Gleber, S.-C., Peth, C., Mann, K., Niemeyer, J. and Thieme, J. (2011)
Characterization of refractory organic substances by NEXAFS using a compact X-ray source
J. Soils Sedimentsopen access,, 12(1): 24-34, DOI:10.1007/s11368-011-0385-9

Bayer, A., Barkusky, F., Dring, S., Gromann, P. and Mann, K. (2010)
Applications of compact laser-driven EUV/XUV plasma sources
X-Ray Optics and Instrumentationopen access,, 2010, DOI:10.1155/2010/687496

Fuchs, B., Schlenkrich, F., Seyffarth, S., Meschede, A., Rotzoll, R., Vana, P., Groß mann, P., Mann, K. and Krebs, H. U. (2010)
Hardening of smooth pulsed laser deposited PMMA films by heating
Applied Physics A: Materials Science and Processing, 98: 711-715, DOI:10.1007/s00339-009-5525-3

Liese, T., Radisch, V. and Krebs, H.-U. (2010)
Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam
Review of Scientific InstrumentsAIP,, 81(7): 073710

Röder, J., Liese, T. and Krebs, H.-U. (2010)
Material-dependent smoothing of periodic rippled structures by pulsed laser deposition
J. Appl. Phys., 107(10): 103515, DOI:10.1063/1.3388591

Reese, M., Schäfer, B., Groß mann, P., Bayer, A., Mann, K., Liese, T. and Krebs, H. U. (2010)
Submicron focusing of XUV radiation from a laser plasma source using a multilayer Laue lens
Appl. Phys. Aopen access,, 102(1): 85-90, DOI:10.1007/s00339-010-6148-4

Peth, C., Barkusky, F. and Mann, K. (2008)
Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source
Journal of Physics D: Applied Physics, 41: 105202, DOI:10.1088/0022-3727/41/10/105202

Peth, C., Kalinin, A., Barkusky, F., Mann, K., Peter Toennies, J. and Rusin, L. Y. (2007)
XUV laser-plasma source based on solid Ar filament
Review of Scientific Instruments, 78: 103509, DOI:10.1063/1.2801882